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Download E-books Characterization and Metrology for ULSI Technology 2000: International Conference (AIP Conference Proceedings) PDF

The global semiconductor neighborhood faces more and more tricky demanding situations because it strikes into the producing of chips with function sizes imminent a hundred nm. a few of the demanding situations are materials-related, reminiscent of transistors with high-k dielectrics and on-chip interconnects made of copper and low-k dielectrics. The value of those demanding situations calls for targeted recognition from these within the metrology and analytical measurements group. Characterization and metrology are key enablers for constructing semiconductor technique expertise and in enhancing production. This e-book summarizes significant concerns and offers severe stories of vital size options which are the most important to proceed the advances in semiconductor know-how. It covers significant facets of the method know-how and so much characterization suggestions for silicon examine, together with improvement, production, and diagnostics. It presents a concise and potent portrayal of characterization wishes and a few of the issues that needs to be addressed by means of undefined, academia, and executive to proceed the dramatic growth in semiconductor expertise. It additionally offers a foundation for exciting sensible views and new principles for examine and improvement.

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