By Professor Victor A. Perevoschikov, Dr. Vladimir D. Skoupov (auth.)
Gettering Defects in Semiconductors fulfills 3 easy purposes:
– to systematize the adventure and study in exploiting a number of gettering options in microelectronics and nanoelectronics;
– to spot new instructions in study, really to augment the point of view of execs and younger researchers and specialists;
– to fill a spot within the modern literature at the underlying semiconductor-material theory.
The authors tackle not just well-established gettering ideas but additionally describe modern tendencies in gettering applied sciences from a world viewpoint. the categories and houses of structural defects in semiconductors, their producing and their reworking mechanisms in the course of fabrication are defined. the first emphasis is put on classifying and describing particular gettering recommendations, their specificity coming up from either their place in a normal technological procedure and the regimes in their software. This booklet addresses either engineers and fabric scientists attracted to semiconducting fabrics idea and in addition undergraduate and graduate scholars in solid–state microelectronics and nanoelectronics. A entire checklist of references presents readers with path for additional reading.
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