Jurusan Manajemen E-books

Equipment

Download E-books Handbook of Thin-Film Deposition Processes and Techniques - Principles, Methods, Equipment and Applic PDF

By Krishna Seshan

New moment variation of the preferred publication on deposition (first variation via Klaus Schruegraf) for engineers, technicians, and plant team of workers within the semiconductor and comparable industries. This ebook strains the know-how in the back of the magnificent development within the silicon semiconductor and the continuing pattern in miniaturization during the last two decades. This progress has been fueled largely via stronger skinny movie deposition thoughts and the advance of hugely really expert gear to let this deposition. The publication contains a lot state-of-the-art fabric. solely new chapters on illness and illness keep an eye on describe the fundamentals and the issues??as characteristic sizes curb to sub-micron dimensions, cleanliness and particle removal has to maintain speed. a brand new bankruptcy on metrology explains the expansion of subtle, automated instruments in a position to measuring thickness and spacing of sub-micron dimensions. The publication additionally covers PVD, laser and e-beam assisted deposition, MBE, and ion beam tips on how to compile all of the actual vapor deposition options. fullyyt new parts obtain complete remedy: chemical mechanical sprucing which is helping reach the flatness that's required via sleek lithography tools, and new fabrics used for interconnect dielectric fabrics, particularly natural polyimide fabrics.

Show description

Read Online or Download Handbook of Thin-Film Deposition Processes and Techniques - Principles, Methods, Equipment and Applic PDF

Similar Equipment books

Managing the Effective Use of Equipment Super Series, Fifth Edition

Tremendous sequence are a collection of workbooks to accompany the versatile studying programme in particular designed and built through the Institute of management & administration (ILM) to help their point three certificates in First Line administration. the educational content material is additionally heavily aligned to the extent three S/NVQ in administration.

Water Treatment Equipment and Services in Canada: A Strategic Reference, 2007

The first viewers for this file is managers concerned with the top degrees of the strategic making plans approach and experts who support their consumers with this job. The person won't in basic terms enjoy the 1000s of hours that went into the method and its software, but in addition from its substitute standpoint on strategic making plans when it comes to water therapy gear and prone in Canada.

Water and Wastewater Equipment and Services in Taiwan: A Strategic Reference, 2006

The first viewers for this file is managers concerned with the top degrees of the strategic making plans technique and specialists who aid their consumers with this activity. The person won't basically enjoy the hundreds of thousands of hours that went into the technique and its software, but additionally from its substitute point of view on strategic making plans on the subject of water and wastewater apparatus and prone in Taiwan.

The Impact of Equipment Availability and Reliability on Mission Outcomes: An Initial Look

This documented briefing describes an preliminary attempt to appreciate analytically how start-of-mission availability and during-mission reliability of military gear have an effect on flooring wrestle potential and to evaluate consequent implications for present and destiny forces. wrestle effects have been simulated utilizing the JANUS version and situations to be had from earlier learn.

Additional info for Handbook of Thin-Film Deposition Processes and Techniques - Principles, Methods, Equipment and Applic

Show sample text content

Rated 4.28 of 5 – based on 6 votes
Equipment

Download E-books Handbook of Thin-Film Deposition Processes and Techniques - Principles, Methods, Equipment and Applications PDF

By Seshan, K.(eds.)

This ebook contains a lot state of the art fabric. solely new chapters on infection and infection regulate describe the fundamentals and the problems - as function sizes lessen to sub-micron dimensions, cleanliness and particle removal has to maintain velocity. a brand new bankruptcy on meterology explains the expansion of refined, computerized instruments in a position to measuring thickness and spacing of sub-micron dimensions. The e-book additionally covers PVD, laser and e-beam assisted deposition, MBE, and ion beam the way to collect the entire actual vapor deposition suggestions. fullyyt new parts obtain complete therapy: chemical mechanical sprucing, which is helping reach the flatness that's required via smooth lithography equipment, and new fabrics used for interconnect dielectric fabrics, in particular natural polyimide fabrics.

Show description

(more…)

Rated 4.96 of 5 – based on 43 votes
Equipment

Download E-books Handbook of Thin Film Deposition Processes and Techniques. Principles, Methods, Equipment and Applicatios PDF

By Krisna Seshan (Eds.)

Content material:
Foreword, Pages ix-x, Gordon E. Moore
Preface to the second one Edition, Pages xi-xii, Krishna Seshan
Preface to the 1st Edition, Pages xiii-xiv, Klaus okay. Schuegraf
Contributors, Pages xv-xvi
Recent alterations within the Semiconductor Industry, Pages 1-9, Krishna Seshan
1 - Deposition applied sciences and purposes: creation and Overview, Pages 11-43, Werner Kern, Klaus okay. Schuegraf
2 - Silicon Epitaxy by way of Chemical Vapor Deposition, Pages 45-110, Martin L. Hammond
3 - Chemical Vapor Deposition of Silicon Dioxide Films, Pages 111-150, John Foggiato
4 - steel natural Chemical Vapor Deposition: know-how and Equipment, Pages 151-203, John L. Zilko
5 - function Scale Modeling, Pages 205-240, Vivek Singh
6 - The position Of Metrology And Inspection In Semiconductor Processing, Pages 241-286, Mark Keefer, Rebecca Pinto, Cheri Dennison, James Turlo
7 - illness keep watch over, illness Detection, and Yield Enhancement in Gigabit Manufacturing, Pages 287-318, Suresh Bhat, Krishna Seshan
8 - Sputtering and Sputter Deposition, Pages 319-348, Stephen Rossnagel
9 - Laser and Electron Beam Assisted Processing, Pages 349-379, Cameron A. Moore, Zeng-qi Yu, Lance R. Thompson, George J. Collins
10 - Molecular Beam Epitaxy: gear and Practice, Pages 381-461, Walter S. Knodle, Robert Chow
11 - Ion Beam Deposition, Pages 463-499, John R. McNeil, James J. McNally, Paul D. Reader
12 - Chemical Mechanical Polishing, Pages 501-512, Kenneth C. Cadien
13 - natural Dielectrics in Multilevel Metallization of built-in Circuits, Pages 513-593, Krishna Seshan, Dominic J. Schepis, Laura B. Rothman
14 - functionality, Processing, and Lithography Trends, Pages 595-607, Krishna Seshan
Index, Pages 609-629

Show description

(more…)

Rated 4.85 of 5 – based on 48 votes