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By E. H. Nicollian

Explains the theoretical and experimental foundations of the dimension of houses of the MOS procedure and the expertise for controlling its homes. Emphasizes the silica and the silica-silicon interface. presents a severe evaluate of the literature, corrects incomplete or unsuitable theoretical formulations, and provides serious comparisons of size tools. includes info had to develop an oxide, make an MOS capacitor array, and fabricate an built-in circuit with optimum functionality and balance.

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